The white light interferometry measurement principle compares the path length of the light reflected or scattered by the object surface with a reference path length. In this patented measurement process, the measuring head scans the object while moving in the z-direction.
The results is a 'depth image' of the object with a very low measurement uncertainty. It combines the advantages of common tactile sensors with the benefits of optical sensors: high measurement accuracy and non-contact, high-speed scanning with a high data rate.
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